Selected Publications |
International Journals
- “Formation of Ultra Shallow p+/n Junction in Silicon Using a Combination of Low-Temperature Solid Phase Epitaxy and Non-melt Double-Pulsed Green Laser Annealing”, Siti Rahmah Aid, Shuhei Hara, Yusuke Shigenaga, Takumi Fukaya,Yuki Tanaka, Satoru Matsumoto, Genshu Fuse, and Susumu Sakuragi, Japanese Journal of Applied Physics vol. 52, pp. 026501 (2013)
- “Comparison of boron diffusion in silicon during shallow p+/n formation by non-melt excimer and green laser annealing”, S.R.Aid, S. Matsumoto, G. Fuse, and S. Sakuragi, Physica Status Solidi A 208 (12), pp. 2772-2777 (2011)
- “Boron Diffusion Behavior During the Formation of Shallow p+/n Junction Using the Non-Melt Excimer Laser (NLA) Processes”, S.R. Aid, S. Matsumoto, and G. Fuse, Physica Status Solidi A vol. 208 (7), pp. 1646-1651 (2011)
- “Si Self-Diffusivity using Isotopically Pure 30Si Epitaxial Layers”, S.R. Aid, T. Sakaguchi, K. Toyonaga, Y. Nakabayashi, S. Matumoto, M. Sakuraba, Y. Shimamune, Y. Hashiba, J. Murota, K. Wada, and T. Abe, Materials Science and Engineering B 114-115, pp. 330-333 (2004)
Proceedings of International Conference
- “Characteristics of BF2, Ga and In Dopants in Si for Halo Implantation”, Y. Matsunaga, S. R. Binti Aid, S. Matsumoto, J. Borland, and M. Tanjyo, Extended Abstract of 11th International Workshop on Junction Technology 2011, Kyoto, pp. 74-77 (2013)
- “Characteristics of BF2, Ga and In Implanted Si after FLA and RTA Annealing”, Bo Wo, Yusuke Matsunaga, Siti Rahmah Binti Aid, Satoru Matsumoto, John Borland, and Masayasu Tanjyo, Proceedings of the 19th International Conference on Ion Implantation Technology 2012, Valladolid, pp. 179-182 (2012)
- “Formation of Shallow p+/n Junction in Silicon by Non-Melt Laser Annealing”, Siti Rahmah Aid, Satoru Matumoto, Genshu Fuse and Susumu Sakuragi, Extended Abstract of 11th International Workshop on Junction Technology 2011, Kyoto, pp. 132-135(2011)
- “Comparison of Boron Diffusion in Silicon During the Formation of Shallow p+/n Junction with KrF and Green Laser Annealing”, S. R. Aid, S. Matsumoto, G. Fuse, and S. Sakuragi, The 219th ECS Meeting in Montreal, Electrochemical Society Transaction 35, pp. 165-172 (2011)
- “Boron Diffusion Behavior during the Formation of Shallow p+/n Junction using the combination of Ge Pre-amorphization Implantation, Pre-Annealing RTA and Post-Annealing Non Melt Excimer Laser Processes”, Siti Rahmah Aid, Satoru Matsumoto, Toshiharu Suzuki, Genshu Fuse, Toshihiro Nakazawa, The 215th ECS Meeting in San Francisco, Electrochemical Society Transactions 19, pp. 71-77 (2009)
- “Silicon Self-Diffusion in Heavily B-Doped Si Using Highly Pure 30Si Epitaxial Layer”, Satoru Matsumoto, S. R. Aid, S. Seto, K. Toyonaga, and Y. Nakabayashi, The 209th ECS Meeting in Denver, Electrochemical Society Transactions 2, pp. 287-297, (2006)
- “Si Self-Diffusivity using Isotopically Pure 30Si Epitaxial Layers”, S.R. Aid, T. Sakaguchi, K. Toyonaga, Y. Nakabayashi, S. Matumoto, M. Sakuraba, Y. Shimamune, Y. Hashiba, J. Murota, K. Wada, and T. Abe, EMRS Spring Meeting 2004 in Strasbourg, Symposium B, Material Science Issues in Advanced CMOS Source-Drain Engineering – B/PII.10 (2004)
- “Si self-diffusion in heavily B-doped epitaxial silicon”, K. Toyonaga, S. Rahamah Bt Aid, Y. Nakabayashi, S. Matsumoto, M. Sakuraba, Y. Shimada, A. Hashiba, and J. Murota, First International SiGe Technology and Device Meeting (ISTDM 2003), Kyoto, Jan 2003, pp. 235-236 (2003)
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