Equipments

We offers a broad range of services that meet both standard requirements and individual needs in the area advanced device fabrication, material and device characterization.

Equipment in class 10,000 clean room 

A. Process/Fabrication

  1. Plasma Enhanced Chemical Vapor Deposition
  2. Dual Zone Furnace for Nitridation process
  3. Electron Beam Evaporator
  4. RF Magnetron Sputtering
  5. Rapid Thermal Annealing
  6. Thermal Evaporator
  7. Oxygen Plasma Etcher
  8. Reactive Ion Etching
  9. Plasma Coater

B. Material & Device Characterization

  1. Hall Effect Measurement
  2. Vector Network Analyzer
  3. Surface Profiler
  4. Raman Spectroscopy
  5. Desiccator

Equipment in class 1,000 clean room 

  1. Electron Beam Lithography
  2. Spin Coater
  3. Photolithography
  4. Oven
  5. Hotplate
  6. Ultra-pure Water
  7. Optical Microscope
  8. UV Desiccator
  9. Vacuum Desiccator

Equipment in Traditional Experimental Room

A. Process

  1. Potentiostat
  2. Viscometer
  3. Sonic Dismembrator
  4. Glove Box
  5. Single Furnace for Oxidation and Annealing in N2
  6. Dual Furnace for Oxidation and Annealing in N2
  7. Gas Sensor Testing Chamber
  8. Desiccator

B. Material and Device Characterization

  1. Semiconductor Device Analyzer
  2. Solar Simulator and Sourcemeter
  3. Microprobe Station
  4. Optical Microscope

Misc: Sample preparation, chemical wet cleaning and process consultation