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Thermal Evaporator | Nanofabrication Laboratory

Thermal Evaporator

Name Thermal Evaporator
Model ULVAC VPC-260F
Description Thermal evaporator is the simpler alternative for thin film metal deposition. The unit use the electrical resistivity to evaporate the metal source (i.e. Al, Ag etc.). Deposition chamber is operated under high vacuum around 104Pa by the resistance heating formula. The vacuum system is facilitated with an oil diffusion pump and an oil rotary vacuum pump. This deposited thickness can be monitored

Note: Au to be provided by user