5-days Hands-on Training on Micro-Nanofabrication



In Malaysia, there are very limited opportunities to have the hands-on training and knowledge dissemination in the field of micro-nanofabrication. MJIIT-UTM have started setting up a state-of–the-art micro and nanofabrication facility that able to provide intensive hands-on training to engineers and researchers coming from all over Malaysia and abroad.

In this hands-on training, the participants will be exposed to various micro/nano-fabrication and characterization techniques utilizing the available state-of-the-art facility.  Specifically, the training will focus on the demonstration of real fabrication practices, the physics and underlying technologies that involved in each process, and the basic techniques for device characterization.

The specific topics covered are:

  • Patterning by optical and electron beam lithography
  • Selective wet etching processes
  • Directional dry etching processes
  • Metal and dielectric deposition by evaporation, sputtering and plasma enhanced chemical vapor deposition
  • Physical and electrical characterization of materials and devices



From this 5-days intensive training, participants will be able to gain the technical knowledge and skills on the following technologies.

  • Cleanroom protocols and safety
  • Materials and vacuum system technologies
  • Micro and nanopatterning technologies
  • Physical and chemical deposition technologies
  • Plasma processing and etching technologies
  • Physical and electrical characterization for materials and devices


  • Session 1/2018: 19 January 2018
  • Session 2/2018: 23 March 2018
  • Session 3/2018: 22 June 2018
  • Session 4/2018: 17 August 2018
  • Session 5/2018: 26 October 2018
  1. Training Schedule
  2. Training Content
  3. About Instructor
  4. Registration Form